Invention Grant
- Patent Title: Integrated extraction electrode manipulator for ion source
- Patent Title (中): 用于离子源的集成提取电极操纵器
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Application No.: US14674694Application Date: 2015-03-31
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Publication No.: US09318302B1Publication Date: 2016-04-19
- Inventor: Bo Vanderberg , Joseph Valinski , Michael Cristoforo
- Applicant: Axcelis Technologies, Inc.
- Applicant Address: US MA Beverly
- Assignee: Axcelis Technologies, Inc.
- Current Assignee: Axcelis Technologies, Inc.
- Current Assignee Address: US MA Beverly
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J37/08 ; H01J37/30 ; H01J37/317

Abstract:
A modular ion source and extraction apparatus comprises an ion source chamber selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture. An extraction electrode is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is electrically grounded and configured to extract ions from the ion source chamber. One or more linkages operably couple to the ion source chamber, and one or more insulators couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes.
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