Invention Grant
- Patent Title: Injection of a filler material with homogeneous distribution of anisotropic filler particles through implosion
- Patent Title (中): 通过内爆注入具有均匀分布的各向异性填料颗粒的填料
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Application No.: US13925050Application Date: 2013-06-24
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Publication No.: US09321245B2Publication Date: 2016-04-26
- Inventor: Michael A. Gaynes , Eric P. Lewandowski , Jae-Woong Nah , Robert J. Polastre
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B32B9/00 ; H05K5/06 ; B05D3/04 ; B32B37/10 ; H01L23/00 ; H05K3/24 ; H05K3/34

Abstract:
A method for providing a matrix material between a bonded pair of substrates with a homogeneous distribution of anisotropic filler particles is provided. Functionalized anisotropic filler particles are mixed uniformly with a matrix material to form a homogenous mixture. A bonded assembly of a first substrate and a second substrate with an array of electrical interconnect structures is placed within a vacuum environment. The homogenous mixture of the matrix material and the anisotropic filler particles is dispensed around the array of electrical interconnect structures. A gas is abruptly introduced into the vacuum environment to induce an implosion of the homogenous mixture. The implosion causes the homogenous mixture to fill the cavity between the first and second substrates without causing agglomeration of the anisotropic filler particles. The mixture filling the space between the first and second substrates has a homogenous distribution of the anisotropic filler particles.
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