Invention Grant
US09322786B2 Solar cell inspection apparatus and solar cell processing apparatus
有权
太阳能电池检查装置和太阳能电池处理装置
- Patent Title: Solar cell inspection apparatus and solar cell processing apparatus
- Patent Title (中): 太阳能电池检查装置和太阳能电池处理装置
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Application No.: US14377725Application Date: 2012-02-10
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Publication No.: US09322786B2Publication Date: 2016-04-26
- Inventor: Yoshio Takami
- Applicant: Yoshio Takami
- Applicant Address: JP Kyoto
- Assignee: SHIMADZU CORPORATION
- Current Assignee: SHIMADZU CORPORATION
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- International Application: PCT/JP2012/053128 WO 20120210
- International Announcement: WO2013/118296 WO 20130815
- Main IPC: G01N21/88
- IPC: G01N21/88 ; G01N21/95 ; H02S50/10 ; G01M11/00 ; H01L31/18 ; G01N21/894

Abstract:
An inspection apparatus 1 for solar cells 100 includes: a visible light source 11 adapted to irradiate visible light; a CCD camera 15 adapted to measure a reflection image based on the visible light reflected by an antireflective film of a solar cell 100; an infrared light source 13 adapted to irradiate the solar cell 100 with infrared light; and a CCD camera 16 adapted to measure a transmission image based on the infrared light transmitting through the solar cell 100. In the inspection apparatus 1, as a result of comparing the reflection image and the transmission image with each other, of areas respectively appearing as bright spots in the reflection image, an area appearing as a dark spot in the transmission image is determined as an area including a particle, whereas of the areas respectively appearing as the bright spots in the reflection image, an area other than the area determined as the area including the particle is determined as an area including a pinhole.
Public/Granted literature
- US20150160138A1 SOLAR CELL INSPECTION APPARATUS AND SOLAR CELL PROCESSING APPARATUS Public/Granted day:2015-06-11
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