Invention Grant
- Patent Title: Forming transistors without spacers and resulting devices
- Patent Title (中): 形成晶体管,不需要间隔物和所产生的器件
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Application No.: US14461713Application Date: 2014-08-18
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Publication No.: US09324831B2Publication Date: 2016-04-26
- Inventor: Gerd Zschätzsch , Stefan Flachowsky , Jan Hoentschel
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L21/265

Abstract:
Methods for forming gates without spacers and the resulting devices are disclosed. Embodiments may include forming a channel layer on a substrate; forming a dummy gate on the channel layer; forming an interlayer dielectric (ILD) on the channel layer and surrounding the dummy gate; forming a trench within the ILD and the channel layer by removing the dummy gate and the channel layer below the dummy gate; forming an un-doped channel region at the bottom of the trench; and forming a gate above the un-doped channel region within the trench.
Public/Granted literature
- US20160049494A1 FORMING TRANSISTORS WITHOUT SPACERS AND RESULTING DEVICES Public/Granted day:2016-02-18
Information query
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