Invention Grant
- Patent Title: Lateral power device having low specific on-resistance and using high-dielectric constant socket structure and manufacturing method therefor
- Patent Title (中): 具有低比导通电阻和使用高介电常数插座结构的侧向功率器件及其制造方法
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Application No.: US14650176Application Date: 2013-12-19
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Publication No.: US09324855B2Publication Date: 2016-04-26
- Inventor: Junhong Li , Ping Li
- Applicant: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Applicant Address: CN Chengdu
- Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Current Assignee: UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA
- Current Assignee Address: CN Chengdu
- Agency: Leason Ellis LLP
- Priority: CN201210558464 20121220
- International Application: PCT/CN2013/001594 WO 20131219
- International Announcement: WO2014/094362 WO 20140626
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/40 ; H01L29/06

Abstract:
Provided is a lateral power device having low specific ON-resistance and using a high-dielectric constant socket structure and a manufacturing method therefor, which relate to semiconductor power devices. A source electrode (8) of the device is of a first conduction type, and a channel region (6), a silicon substrate (4) and an ohmic contact heavily-doped region are of a second conduction type; at least two isolation regions are arranged in an embedded manner in a drift region (1); between the isolation regions are the drift region (1) and the channel region (6); each isolation region extends from the source electrode (8) to a drain electrode (11); high-dielectric constant material strips (3) and first insulation dielectric layers (10) form boundaries of the bottoms and sidewalls of the isolation regions; the isolation regions are filled with a first filling material (2), a second insulation dielectric layer (9) is arranged on the upper surface of the drift region (1) and the upper surfaces of the isolation regions, and a gate electrode (5) directly contacts the first filling material (2) via holes on the second insulation dielectric layer (9); and a source electrode lead-out wire (16) and a drain electrode lead-out wire (12) directly contact the source electrode (8) and the drain electrode (11) respectively via the holes on the second insulation dielectric layer (9). The area of a power device can be greatly reduced on the premise of not reducing the withstand voltage and not increasing the specific ON-resistance.
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Information query
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