Invention Grant
- Patent Title: Nonpolymeric antireflection compositions containing adamantyl groups
- Patent Title (中): 含有金刚烷基的非聚合抗反射组合物
-
Application No.: US13743965Application Date: 2013-01-17
-
Publication No.: US09328246B2Publication Date: 2016-05-03
- Inventor: Daniel M. Sullivan , Charlyn Stroud , Jinhua Dai
- Applicant: Brewer Science Inc.
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Hovey Williams LLP
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/40 ; C09D5/00 ; G03F7/30 ; G03F7/09 ; C07D303/23 ; C07C69/76 ; C07C69/94 ; H01L21/027

Abstract:
Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.
Public/Granted literature
- US20130186851A1 NONPOLYMERIC ANTIREFLECTION COMPOSITIONS CONTAINING ADAMANTYL GROUPS Public/Granted day:2013-07-25
Information query
IPC分类: