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US09328246B2 Nonpolymeric antireflection compositions containing adamantyl groups 有权
含有金刚烷基的非聚合抗反射组合物

Nonpolymeric antireflection compositions containing adamantyl groups
Abstract:
Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.
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