公开(公告)号：US09328246B2

公开(公告)日：2016-05-03

申请号：US13743965

申请日：2013-01-17

Applicant: Brewer Science Inc.

Inventor： Daniel M. Sullivan ,  Charlyn Stroud ,  Jinhua Dai

IPC: G03F7/11 ,  G03F7/40 ,  C09D5/00 ,  G03F7/30 ,  G03F7/09 ,  C07D303/23 ,  C07C69/76 ,  C07C69/94 ,  H01L21/027

CPC classification number: C09D5/006 ,  C07C69/76 ,  C07C69/94 ,  C07C2603/24 ,  C07C2603/74 ,  C07D303/23 ,  G03F7/091 ,  G03F7/094 ,  G03F7/30 ,  G03F7/40 ,  H01L21/0276 ,  Y10T428/265 ,  Y10T428/31511 ,  Y10T428/31525 ,  Y10T428/31529

Abstract: Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.

Abstract translation: 提供用于形成微电子结构的非聚合物，组合物和方法以及由其形成的结构。 非聚合化合物是包含至少两个环氧部分和至少一个金刚烷基的开环环氧金刚烷衍生物，以及与相应环氧部分键合的至少一个化学修饰基团，例如发色团。 抗反射和/或平面化组合物可以使用这些化合物形成并用于光刻工艺，包括微电子结构的制造。

公开(公告)号：US20130186851A1

公开(公告)日：2013-07-25

申请号：US13743965

申请日：2013-01-17

Applicant: Brewer Science Inc.

Inventor： Daniel M. Sullivan ,  Charlyn Stroud ,  Jinhua Dai

IPC: C09D5/00

CPC classification number: C09D5/006 ,  C07C69/76 ,  C07C69/94 ,  C07C2603/24 ,  C07C2603/74 ,  C07D303/23 ,  G03F7/091 ,  G03F7/094 ,  G03F7/30 ,  G03F7/40 ,  H01L21/0276 ,  Y10T428/265 ,  Y10T428/31511 ,  Y10T428/31525 ,  Y10T428/31529

Abstract: Nonpolymeric compounds, compositions, and methods for forming microelectronic structures, and the structures formed therefrom are provided. The nonpolymeric compounds are ring-opened, epoxide-adamantane derivatives that comprise at least two epoxy moieties and at least one adamantyl group, along with at least one chemical modification group, such as a chromophore, bonded to a respective epoxy moiety. Anti-reflective and/or planarization compositions can be formed using these compounds and used in lithographic processes, including fabrication of microelectronic structures.

Abstract translation: 提供用于形成微电子结构的非聚合物，组合物和方法以及由其形成的结构。 非聚合化合物是包含至少两个环氧部分和至少一个金刚烷基的开环环氧金刚烷衍生物，以及与相应环氧部分键合的至少一个化学修饰基团，例如发色团。 抗反射和/或平面化组合物可以使用这些化合物形成并用于光刻工艺，包括微电子结构的制造。