发明授权
- 专利标题: Cleaning liquid composition for electronic device
- 专利标题(中): 电子设备清洗液组合物
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申请号: US13705575申请日: 2012-12-05
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公开(公告)号: US09334470B2公开(公告)日: 2016-05-10
- 发明人: Yumiko Taniguchi , Kikue Morita , Chiyoko Horike , Takuo Ohwada
- 申请人: Kanto Kagaku Kabushiki Kaisha
- 申请人地址: JP Tokyo
- 专利权人: KANTO KAGAKU KABUSHIKI KAISHA
- 当前专利权人: KANTO KAGAKU KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 代理机构: Hauptman Ham, LLP
- 优先权: JP2011-267368 20111206
- 主分类号: C11D7/32
- IPC分类号: C11D7/32 ; C11D7/36 ; C11D11/00 ; C23G1/18 ; C23G1/20 ; H01L21/02 ; C11D3/30 ; C11D3/36
摘要:
[Purpose]To provide a cleaning liquid composition that has excellent removability for metallic impurities and particulates, does not cause corrosion of Cu, and can clean a semiconductor substrate having copper wiring in a production process for an electronic device such as a semiconductor device.[Solution means]A cleaning liquid composition for cleaning a semiconductor substrate having copper wiring, the cleaning liquid composition containing one or more types of basic compound containing no metal, and one or more types of phosphonic acid-based chelating agent, and having a hydrogen ion concentration (pH) of 8 to 10.
公开/授权文献
- US20130143785A1 CLEANING LIQUID COMPOSITION FOR ELECTRONIC DEVICE 公开/授权日:2013-06-06
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