Invention Grant
US09337064B2 Methods of protecting peripheries of in-process semiconductor wafers and related in-process wafers and systems 有权
保护工艺中半导体晶圆和相关工艺中晶片和系统的周边的方法

Methods of protecting peripheries of in-process semiconductor wafers and related in-process wafers and systems
Abstract:
Methods of processing semiconductor wafers may involve, for example, encapsulating an active surface and each side surface of a wafer of semiconductor material, a plurality of semiconductor devices located on the active surface of the wafer, an exposed side surface of an adhesive material located on a back side surface of the wafer, and at least a portion of a side surface of a carrier substrate secured to the wafer by the adhesive material in an encapsulation material. At least a portion of the side surface of the adhesive material may be exposed by removing at least a portion of the encapsulation material. The carrier substrate may be detached from the wafer. Processing systems and in-process semiconductor wafers are also disclosed.
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