Invention Grant
US09337064B2 Methods of protecting peripheries of in-process semiconductor wafers and related in-process wafers and systems
有权
保护工艺中半导体晶圆和相关工艺中晶片和系统的周边的方法
- Patent Title: Methods of protecting peripheries of in-process semiconductor wafers and related in-process wafers and systems
- Patent Title (中): 保护工艺中半导体晶圆和相关工艺中晶片和系统的周边的方法
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Application No.: US14485973Application Date: 2014-09-15
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Publication No.: US09337064B2Publication Date: 2016-05-10
- Inventor: Wei Zhou , Aibin Yu , Zhaohui Ma
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L23/58 ; H01L21/00 ; H01L21/56 ; H01L21/311 ; H01L21/306 ; H01L21/324 ; H01L23/31

Abstract:
Methods of processing semiconductor wafers may involve, for example, encapsulating an active surface and each side surface of a wafer of semiconductor material, a plurality of semiconductor devices located on the active surface of the wafer, an exposed side surface of an adhesive material located on a back side surface of the wafer, and at least a portion of a side surface of a carrier substrate secured to the wafer by the adhesive material in an encapsulation material. At least a portion of the side surface of the adhesive material may be exposed by removing at least a portion of the encapsulation material. The carrier substrate may be detached from the wafer. Processing systems and in-process semiconductor wafers are also disclosed.
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