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US09337622B2 Compact distributed bragg reflectors 有权
紧凑的分布式布拉格反射器

Compact distributed bragg reflectors
Abstract:
Ultra compact DBRs, VCSELs incorporating the DBRs and methods for making the DBRs are provided. The DBRs are composed of a vertical reflector stack comprising a plurality of adjacent layer pairs, wherein each layer pair includes a layer of single-crystalline Group IV semiconductor and an adjacent layer of silicon dioxide.
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