Invention Grant
US09343316B2 Methods of forming memory cells with air gaps and other low dielectric constant materials 有权
用气隙和其他低介电常数材料形成记忆体的方法

Methods of forming memory cells with air gaps and other low dielectric constant materials
Abstract:
Various embodiments include methods of forming memory cells. In one embodiment, a first dielectric material and a second dielectric material are formed on a substrate. A conductive material is formed between the first dielectric material and the second dielectric material. An opening is formed through the first dielectric material, the second dielectric material, and the conductive material. The conductive material is recessed laterally from the opening to form a recessed control gate and to expose portions of the first dielectric material and the second dielectric material. Portions of a third dielectric material are formed over the exposed portions of the first dielectric material and the second dielectric material and a charge storage element is formed between the portions of the third dielectric material and adjacent to the recessed control gate. Portions of the third dielectric material are substantially removed. Additional methods, as well as apparatuses, are disclosed.
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