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US09343478B2 Nonvolatile memory device and method of manufacturing the same 有权
非易失性存储器件及其制造方法

Nonvolatile memory device and method of manufacturing the same
Abstract:
A nonvolatile memory device includes gate electrodes three dimensionally arranged on a semiconductor substrate, a semiconductor pattern extending from the semiconductor substrate and crossing sidewalls of the gate electrodes, a metal liner pattern formed between the semiconductor pattern and formed on a top surface and a bottom surface of each of the gate electrodes, and a charge storage layer formed between the semiconductor pattern and the metal liner pattern.
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