Invention Grant
- Patent Title: Semiconductor device with self-aligned contact and method of manufacturing the same
- Patent Title (中): 具有自对准接触的半导体器件及其制造方法
-
Application No.: US13902975Application Date: 2013-05-27
-
Publication No.: US09349812B2Publication Date: 2016-05-24
- Inventor: Chieh-Te Chen , Feng-Yi Chang , Hsuan-Hsu Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/417
- IPC: H01L29/417 ; H01L29/06 ; H01L21/311 ; H01L21/768 ; H01L23/485 ; H01L29/66

Abstract:
A semiconductor device with a self-aligned contact and a method of manufacturing the same, wherein the method comprises the step of forming a 1st dielectric layer on gate structures, form a self-aligned contact trench between two gate structures, forming an 2nd dielectric layer on the 1st dielectric layer and in the self-aligned contact trench; patterning the 2nd dielectric layer into a 1st portion on the 1st dielectric layer and a 2nd portion filling in the self-aligned contact trench, using the 2nd dielectric layer as a mask to etch the 1st dielectric layer, and forming a metal layer and a self-aligned contact simultaneously in the 1st dielectric layer and in the self-aligned contact trench.
Public/Granted literature
- US20140346575A1 SEMICONDUCTOR DEVICE WITH SELF-ALIGNED CONTACT AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2014-11-27
Information query
IPC分类: