发明授权
- 专利标题: Release strategies for making transferable semiconductor structures, devices and device components
- 专利标题(中): 制定可转移半导体结构,器件和器件组件的策略
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申请号: US14246962申请日: 2014-04-07
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公开(公告)号: US09349900B2公开(公告)日: 2016-05-24
- 发明人: John A. Rogers , Ralph G. Nuzzo , Matthew Meitl , Heung Cho Ko , Jongseung Yoon , Etienne Menard , Alfred J. Baca
- 申请人: The Board of Trustees of the University of Illinois
- 申请人地址: US IL Urbana
- 专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人: The Board of Trustees of the University of Illinois
- 当前专利权人地址: US IL Urbana
- 代理机构: Lathrop & Gage LLP
- 主分类号: H01L31/0735
- IPC分类号: H01L31/0735 ; B81C1/00 ; H01L21/78 ; H01L29/15 ; H01L29/20 ; H01L31/068 ; H01L31/0687 ; H01L31/072 ; H01L31/0725 ; B82Y10/00 ; B82Y20/00 ; B82Y40/00 ; H01L31/0304 ; H01L31/18 ; H01L33/00
摘要:
Provided are methods for making a device or device component by providing a multi layer structure having a plurality of functional layers and a plurality of release layers and releasing the functional layers from the multilayer structure by separating one or more of the release layers to generate a plurality of transferable structures. The transferable structures are printed onto a device substrate or device component supported by a device substrate. The methods and systems provide means for making high-quality and low-cost photovoltaic devices, transferable semiconductor structures, (opto-)electronic devices and device components.
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