Invention Grant
- Patent Title: MEMS resonant accelerometer having improved electrical characteristics
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Application No.: US13952503Application Date: 2013-07-26
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Publication No.: US09354246B2Publication Date: 2016-05-31
- Inventor: Barbara Simoni , Claudia Comi , Alberto Corigliano
- Applicant: STMicroelectronics S.r.I.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law PLLC
- Priority: ITTO2009A0687 20090907
- Main IPC: G01P15/097
- IPC: G01P15/097 ; G01P15/10

Abstract:
A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.
Public/Granted literature
- US20150362522A1 MEMS RESONANT ACCELEROMETER HAVING IMPROVED ELECTRICAL CHARACTERISTICS Public/Granted day:2015-12-17
Information query
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