Invention Grant
- Patent Title: Ionization vacuum gauge
- Patent Title (中): 电离真空计
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Application No.: US13661011Application Date: 2012-10-25
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Publication No.: US09355825B2Publication Date: 2016-05-31
- Inventor: Peng Liu , Duan-Liang Zhou , Chun-Hai Zhang , Jing Qi , Pi-Jin Chen , Shou-Shan Fan
- Applicant: Peng Liu , Duan-Liang Zhou , Chun-Hai Zhang , Jing Qi , Pi-Jin Chen , Shou-Shan Fan
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: CN Beijing TW New Taipei
- Agency: Novak Druce Connolly Bove + Quigg LLP
- Main IPC: G01L21/34
- IPC: G01L21/34 ; B82Y10/00 ; B82Y30/00 ; H01J41/06

Abstract:
An ionization vacuum gauge includes a cathode, an anode and an ion collector. The ion collector component is located at one side of the anode component and spaced from the anode component. The cathode component is located at another side of the anode component and includes an electron emitter, which extends toward the anode component from the cathode component. The electron emitter includes at least one carbon nanotube wire.
Public/Granted literature
- US20130106431A1 IONIZATION VACUUM GAUGE Public/Granted day:2013-05-02
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