Invention Grant
- Patent Title: Methods of forming and using materials containing silicon and nitrogen
- Patent Title (中): 形成和使用含硅和氮的材料的方法
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Application No.: US14497080Application Date: 2014-09-25
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Publication No.: US09355837B2Publication Date: 2016-05-31
- Inventor: Eugene P. Marsh
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L45/00

Abstract:
Some embodiments include methods utilizing atomic layer deposition to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses SiI4 as one precursor and uses a nitrogen-containing material as another precursor. Some embodiments include methods of forming a structure in which a chalcogenide region is formed over a semiconductor substrate; and in which SiI4 is used as a precursor during formation of silicon nitride material directly against a surface of the chalcogenide region.
Public/Granted literature
- US20160093484A1 Methods of Forming and Using Materials Containing Silicon and Nitrogen Public/Granted day:2016-03-31
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