Invention Grant
US09355837B2 Methods of forming and using materials containing silicon and nitrogen 有权
形成和使用含硅和氮的材料的方法

Methods of forming and using materials containing silicon and nitrogen
Abstract:
Some embodiments include methods utilizing atomic layer deposition to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses SiI4 as one precursor and uses a nitrogen-containing material as another precursor. Some embodiments include methods of forming a structure in which a chalcogenide region is formed over a semiconductor substrate; and in which SiI4 is used as a precursor during formation of silicon nitride material directly against a surface of the chalcogenide region.
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