Invention Grant
- Patent Title: Installation fixture for elastomer bands and methods of using the same
- Patent Title (中): 用于弹性带的安装夹具及其使用方法
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Application No.: US14470477Application Date: 2014-08-27
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Publication No.: US09355884B2Publication Date: 2016-05-31
- Inventor: Rish Chhatre , David Schaefer , Sung Lee , Dan Haber
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/67

Abstract:
A kit comprising an installation fixture, a plurality of mechanical fasteners and an embedding tool is provided which allows for an elastomer band to be disposed in a mounting groove around a semiconductor substrate support in a manner that relieves the internal stresses of the elastomer band, leading to an elastomer band with a longer operational lifetime. The installation fixture is secured to a substrate support with mechanical fasteners. An elastomer band is placed around an outer circumference of the installation fixture and rotated back and forth to relieve internal stresses of the elastomer band. The fixture is inverted and the elastomer band is slid vertically off the fixture and into the mounting groove. An embedding tool can be used to completely insert the elastomer band into the mounting groove.
Public/Granted literature
- US20140366360A1 INSTALLATION FIXTURE FOR ELASTOMER BANDS AND METHODS OF USING THE SAME Public/Granted day:2014-12-18
Information query
IPC分类: