Invention Grant
- Patent Title: Nanowire-based mechanical switching device
- Patent Title (中): 基于纳米线的机械开关装置
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Application No.: US13996507Application Date: 2013-03-14
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Publication No.: US09362074B2Publication Date: 2016-06-07
- Inventor: Chytra Pawashe , Kevin Lin , Anurag Chaudhry , Raseong Kim , Seiyon Kim , Kelin Kuhn , Sasikanth Manipatruni , Rafael Rios , Ian A. Young
- Applicant: Chytra Pawashe , Kevin Lin , Anurag Chaudhry , Raseong Kim , Seiyon Kim , Kelin Kuhn , Sasikanth Manipatruni , Rafael Rios , Ian A. Young
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- International Application: PCT/US2013/031607 WO 20130314
- International Announcement: WO2014/142910 WO 20140918
- Main IPC: H01H51/22
- IPC: H01H51/22 ; H01H59/00 ; B82Y10/00 ; H01H1/00 ; H01H9/02

Abstract:
Nanowire-based mechanical switching devices are described. For example, a nanowire relay includes a nanowire disposed in a void disposed above a substrate. The nanowire has an anchored portion and a suspended portion. A first gate electrode is disposed adjacent the void, and is spaced apart from the nanowire. A first conductive region is disposed adjacent the first gate electrode and adjacent the void, and is spaced apart from the nanowire.
Public/Granted literature
- US20140262707A1 NANOWIRE-BASED MECHANICAL SWITCHING DEVICE Public/Granted day:2014-09-18
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