Invention Grant
US09362715B2 Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material
有权
制造具有改善基板材料用途的含镓和氮的轴承激光器件的方法
- Patent Title: Method for manufacturing gallium and nitrogen bearing laser devices with improved usage of substrate material
- Patent Title (中): 制造具有改善基板材料用途的含镓和氮的轴承激光器件的方法
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Application No.: US14176403Application Date: 2014-02-10
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Publication No.: US09362715B2Publication Date: 2016-06-07
- Inventor: Alexander Sztein , Melvin McLaurin , Po Shan Hsu , James W. Raring
- Applicant: Soraa Laser Diode, Inc.
- Applicant Address: US CA Goleta
- Assignee: Soraa Laser Diode, Inc
- Current Assignee: Soraa Laser Diode, Inc
- Current Assignee Address: US CA Goleta
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01S5/02 ; H01S5/022 ; H01S5/32 ; H01S5/343

Abstract:
In an example, the present invention provides a method for manufacturing a gallium and nitrogen containing laser diode device. The method includes providing a gallium and nitrogen containing substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising of at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The method includes patterning the epitaxial material to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. The method includes transferring each of the plurality of dice to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch corresponding to the design width.
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