Invention Grant
US09372392B2 Reticles for use in forming implant masking layers and methods of forming implant masking layers
有权
用于形成植入物掩模层的网状物和形成植入物掩蔽层的方法
- Patent Title: Reticles for use in forming implant masking layers and methods of forming implant masking layers
- Patent Title (中): 用于形成植入物掩模层的网状物和形成植入物掩蔽层的方法
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Application No.: US14325515Application Date: 2014-07-08
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Publication No.: US09372392B2Publication Date: 2016-06-21
- Inventor: Martin Mazur , Dietmar Henke , Hans-Juergen Thees
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: G03F1/22
- IPC: G03F1/22 ; G03F1/24 ; G03F7/20 ; G03F1/00

Abstract:
In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the arrangement is offset from the center of the body, and at least one open feature defined on or through the body of the reticle. In another example, a method is disclosed that includes forming a layer of photoresist above a plurality of functional die and a plurality of incomplete die, exposing the photoresist material positioned above at least one of the functional die and/or at least one of the incomplete die, performing an incomplete die exposure processes via an open feature of the reticle to expose substantially all of the photoresist material positioned above the plurality of incomplete die, and developing the photoresist to remove the portions of the photoresist material positioned above the incomplete die.
Public/Granted literature
- US20140329173A1 RETICLES FOR USE IN FORMING IMPLANT MASKING LAYERS AND METHODS OF FORMING IMPLANT MASKING LAYERS Public/Granted day:2014-11-06
Information query