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US09373586B2 Copper etching integration scheme 有权
铜蚀刻集成方案

Copper etching integration scheme
Abstract:
The present disclosure is directed to an interconnect structure. The metal interconnect structure has a metal body disposed over a semiconductor substrate and a projection extending from the metal body. A barrier layer continuously extends over the projection from a first sidewall of metal body to an opposing second sidewall of the metal body. A layer of dielectric material is disposed over the semiconductor substrate at a position abutting the metal body and the projection.
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