Invention Grant
- Patent Title: Lithographic apparatus and table for use in such an apparatus
- Patent Title (中): 用于这种装置的平版印刷设备和工作台
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Application No.: US14648620Application Date: 2013-12-20
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Publication No.: US09377697B2Publication Date: 2016-06-28
- Inventor: Mark Johannes Hermanus Frencken , Andre Bernardus Jeunink , Frederikus Johannes Maria De Vreede , Gijs Kramer
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2013/077561 WO 20131220
- International Announcement: WO2014/096299 WO 20140626
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/42 ; G03F7/20

Abstract:
An immersion lithographic apparatus includes a projection system, a first table with a first planar surface and a second table with a second planar surface, the first and second planar surfaces being substantially coplanar, a liquid confinement system configured to spatially confine an immersion liquid to a volume with a first surface area that is coplanar with the first and second planar surfaces, and is substantially smaller than a second surface area of the top surface of the substrate, and a swap bridge member attached to the first table, the swap bridge member having an upper surface that is substantially coplanar with the first and second planar surfaces, wherein the upper surface of the swap bridge member is configured to serve as part of the liquid confinement system and to deform when the swap bridge member collides with the second table and to remain attached to the first table.
Public/Granted literature
- US20150309419A1 LITHOGRAPHIC APPARATUS AND TABLE FOR USE IN SUCH AN APPARATUS Public/Granted day:2015-10-29
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