Invention Grant
- Patent Title: Static random access memory
- Patent Title (中): 静态随机存取存储器
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Application No.: US14749623Application Date: 2015-06-24
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Publication No.: US09379119B1Publication Date: 2016-06-28
- Inventor: Chun-Hsien Huang , Yu-Tse Kuo , Shu-Ru Wang , Yu-Hsiang Hung , Ssu-I Fu , Chih-Kai Hsu , Jyh-Shyang Jenq
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: CN201510311537 20150609
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L27/11 ; H01L23/522 ; H01L23/528 ; H01L27/088 ; H01L27/02 ; H01L27/092

Abstract:
A static random access memory (SRAM) is disclosed. The SRAM includes a plurality of SRAM cells on a substrate, in which each of the SRAM cells further includes: a gate structure on the substrate, a plurality of fin structures disposed on the substrate, where each fin structure is arranged perpendicular to the arrangement direction of the gate structure, a first interlayer dielectric (ILD) layer around the gate structure, a first contact plug in the first ILD layer, where the first contact plug is strip-shaped and contacts two different fin structures; and a second ILD layer on the first ILD layer.
Information query
IPC分类: