Invention Grant
- Patent Title: Microelectromechanical sensor with out-of-plane sensing and process for manufacturing a microelectromechanical sensor
- Patent Title (中): 具有平面外感测的微机电传感器和用于制造微机电传感器的工艺
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Application No.: US13779002Application Date: 2013-02-27
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Publication No.: US09383382B2Publication Date: 2016-07-05
- Inventor: Barbara Simoni , Carlo Valzasina
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group PLLC
- Priority: ITTO2012A0179 20120228
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81C1/00 ; G01P15/08 ; B81B3/00

Abstract:
A microelectromechanical sensor that in one embodiment includes a supporting structure, having a substrate and electrode structures anchored to the substrate; and a sensing mass, movable with respect to the supporting structure so that a distance between the sensing mass and the substrate is variable. The sensing mass is provided with movable electrodes capacitively coupled to the electrode structures. Each electrode structure comprises a first fixed electrode and a second fixed electrode mutually insulated by a dielectric region and arranged in succession in a direction substantially perpendicular to a face of the substrate.
Public/Granted literature
Information query
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