Invention Grant
- Patent Title: Three dimensional semiconductor memory devices and methods of fabricating the same
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Application No.: US14753713Application Date: 2015-06-29
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Publication No.: US09385139B2Publication Date: 2016-07-05
- Inventor: Sung-Il Chang , Youngwoo Park , Jaegoo Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2010-0085647 20100901
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L27/115 ; H01L21/28 ; H01L21/311 ; H01L29/423

Abstract:
A 3D semiconductor device includes an electrode structure has electrodes stacked on a substrate, semiconductor patterns penetrating the electrode structure, charge storing patterns interposed between the semiconductor patterns and the electrode structure, and blocking insulating patterns interposed between the charge storing patterns and the electrode structure. Each of the blocking insulating patterns surrounds the semiconductor patterns, and the charge storing patterns are horizontally spaced from each other and configured in such a way as to each be disposed around a respective one of the semiconductor patterns. Also, each of the charge storing patterns includes a plurality of horizontal segments, each interposed between vertically adjacent ones of the electrodes.
Public/Granted literature
- US20150303215A1 THREE DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME Public/Granted day:2015-10-22
Information query
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