Invention Grant
US09385309B2 Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials
有权
平滑的种子层具有均匀的结晶纹理，用于高垂直磁各向异性材料
- Patent Title: Smooth seed layers with uniform crystalline texture for high perpendicular magnetic anisotropy materials
- Patent Title (中): 平滑的种子层具有均匀的结晶纹理，用于高垂直磁各向异性材料
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Application No.: US14334015Application Date: 2014-07-17
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Publication No.: US09385309B2Publication Date: 2016-07-05
- Inventor: Matthias Georg Gottwald , Jimmy Kan , Kangho Lee , Chando Park , Seung Hyuk Kang
- Applicant: QUALCOMM Incorporated
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM INCORPORATED
- Current Assignee: QUALCOMM INCORPORATED
- Current Assignee Address: US CA San Diego
- Agency: Seyfarth Shaw LLP
- Main IPC: H01L29/82
- IPC: H01L29/82 ; H01L43/12 ; H01L43/08 ; G11C11/16 ; H01L43/10 ; H01L27/22
Abstract:
A method for fabricating a perpendicular magnetic tunnel junction (pMTJ) device includes growing a seed layer on a first electrode of the pMTJ device. The seed layer has a uniform predetermined crystal orientation along a growth axis. The method also includes planarizing the seed layer while maintaining the uniform predetermined crystal orientation of the seed layer.
Public/Granted literature
- US20150311427A1 SMOOTH SEED LAYERS WITH UNIFORM CRYSTALLINE TEXTURE FOR HIGH PERPENDICULAR MAGNETIC ANISOTROPY MATERIALS Public/Granted day:2015-10-29
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