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US09388328B2 Lapping slurry having a cationic surfactant 有权
具有阳离子表面活性剂的研磨浆料

Lapping slurry having a cationic surfactant
Abstract:
A lapping slurry and method of making the lapping slurry are provided. The lapping slurry comprises abrasive grains dispersed in a carrier. The carrier comprises water, ethylene glycol and between about 0.5 wt % to about 60 wt % surfactant. Abrasive particles are positively charged when dispersed in ethylene glycol having a pH in a range of from 5 to 9, as evidenced by zeta potentials.
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