发明授权
- 专利标题: Packaging methods, material dispensing methods and apparatuses, and automated measurement systems
- 专利标题(中): 包装方法,材料分配方法和装置以及自动测量系统
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申请号: US13420383申请日: 2012-03-14
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公开(公告)号: US09390060B2公开(公告)日: 2016-07-12
- 发明人: Chien Rhone Wang , Chih-Wei Lai , Chih-Chiang Chang , Kewei Zuo , Jing-Cheng Lin
- 申请人: Chien Rhone Wang , Chih-Wei Lai , Chih-Chiang Chang , Kewei Zuo , Jing-Cheng Lin
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G06F17/00 ; H01L23/00 ; H01L25/065
摘要:
Packaging methods, material dispensing methods and apparatuses, and automatic measurement systems are disclosed. In one embodiment, a method of packaging semiconductor devices includes coupling a second die to a top surface of a first die, dispensing a first amount of underfill material between the first die and the second die, and capturing an image of the underfill material. Based on the image captured, a second amount or no additional amount of underfill material is dispensed between the first die and the second die.
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