Invention Grant
- Patent Title: Non-invasive charged particle beam monitor
- Patent Title (中): 非侵入性带电粒子束监测器
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Application No.: US14486739Application Date: 2014-09-15
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Publication No.: US09390887B2Publication Date: 2016-07-12
- Inventor: Thomas Plettner , John Gerling
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: JDI Patent
- Agent Joshua D. Isenberg
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/28 ; H01J37/244

Abstract:
An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
Public/Granted literature
- US20150076350A1 NON-INVASIVE CHARGED PARTICLE BEAM MONITOR Public/Granted day:2015-03-19
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