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    NON-INVASIVE CHARGED PARTICLE BEAM MONITOR
    1.
    发明申请
    NON-INVASIVE CHARGED PARTICLE BEAM MONITOR 有权
    非投入充电颗粒光束监视器

    公开(公告)号：US20150076350A1

    公开(公告)日：2015-03-19

    申请号：US14486739

    申请日：2014-09-15

    Applicant: KLA-Tencor Corporation

    Inventor： Thomas Plettner ,  John Gerling

    IPC: H01J37/244 ,  H01J37/28 ,  H01J37/22

    CPC classification number: H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/2482

    Abstract: An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    Abstract translation: 靠近非相对论带电粒子束的设计轨迹放置的电磁雷达场检测器响应于带电粒子束的通过而产生光信号而不中断带电粒子束。 光子检测器接收光信号并产生相应的输出。 尾波检测器可以基于电光效应。 具体地，检测器可以测量带电粒子束的辐射束对在附近的电光波导中平行于光束行进的辐射相位的影响。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

    Non-invasive charged particle beam monitor
    3.
    发明授权
    Non-invasive charged particle beam monitor 有权
    非侵入性带电粒子束监测器

    公开(公告)号：US09390887B2

    公开(公告)日：2016-07-12

    申请号：US14486739

    申请日：2014-09-15

    Applicant: KLA-Tencor Corporation

    Inventor： Thomas Plettner ,  John Gerling

    IPC: H01J37/22 ,  H01J37/28 ,  H01J37/244

    CPC classification number: H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/2482

    Abstract: An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    Abstract translation: 靠近非相对论带电粒子束的设计轨迹放置的电磁雷达场检测器响应于带电粒子束的通过而产生光信号而不中断带电粒子束。 光子检测器接收光信号并产生相应的输出。 尾波检测器可以基于电光效应。 具体地，检测器可以测量带电粒子束的辐射束对在附近的电光波导中平行于光束行进的辐射相位的影响。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

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