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13 条记录 (耗时 0.014 秒)

    Multi-Column Scanning Electron Microscopy System
    1.
    发明申请
    Multi-Column Scanning Electron Microscopy System 审中-公开

    公开(公告)号：US20180226219A1

    公开(公告)日：2018-08-09

    申请号：US15612862

    申请日：2017-06-02

    申请人： KLA-Tencor Corporation

    发明人： Robert Haynes ,  Aron Welk ,  Tomas Plettner ,  John Gerling ,  Mehran Nasser Ghodsi

    IPC分类号： H01J37/147 ,  H01J37/28 ,  H01J37/285

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J37/285 ,  H01J2237/28

    摘要： A multi-column scanning electron microscopy (SEM) system includes a column assembly, where the column assembly includes a first substrate array assembly and at least a second substrate array assembly. The system also includes a source assembly, the source assembly including two or more illumination sources configured to generate two or more electron beams and two or more sets of a plurality of positioners configured to adjust a position of a particular illumination source of the two or more illumination sources in a plurality of directions. The system also includes a stage configured to secure a sample, where the column assembly directs at least a portion of the two or more electron beams onto a portion of the sample.

    ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY
    5.
    发明申请
    ASYMMETRICAL DETECTOR DESIGN AND METHODOLOGY 有权
    非对称性检测器的设计与方法

    公开(公告)号：US20150069234A1

    公开(公告)日：2015-03-12

    申请号：US14476537

    申请日：2014-09-03

    申请人： KLA-Tencor Corporation

    发明人： John Gerling ,  Tomas Plettner ,  Mehran Nasser-Ghodsi

    IPC分类号： H01J37/28 ,  H01J37/20 ,  H01J37/14 ,  H01J37/22

    CPC分类号： H01J37/28 ,  H01J37/244 ,  H01J2237/2446 ,  H01J2237/28

    摘要： A charged particle detection device has an active portion for configured to produce a signal in response secondary charged particles emitted from a sample landing on the active portion. The active portion is shaped to accommodate an expected asymmetric pattern of the secondary charged particles at a detector. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译： 带电粒子检测装置具有有源部分，用于配置为产生响应从活性部分上的样品着陆点发射的二次带电粒子的信号。 活性部分被成形为在检测器处适应预期的二次带电粒子的非对称图案。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

    Multi-column scanning electron microscopy system
    6.
    发明授权
    Multi-column scanning electron microscopy system 有权

    公开(公告)号：US10354832B2

    公开(公告)日：2019-07-16

    申请号：US15616749

    申请日：2017-06-07

    申请人： KLA-Tencor Corporation

    发明人： Robert Haynes ,  John Gerling ,  Aron Welk ,  Christopher Sears ,  Felipe Fuks ,  Mehran Nasser-Ghodsi ,  Tomas Plettner

    IPC分类号： H01J37/147 ,  H01J37/14 ,  H01J37/285 ,  H01J37/18

    摘要： A multi-column scanning electron microscopy (SEM) system is disclosed. The SEM system includes a source assembly. The source assembly includes two or more electron beam sources configured to generate a plurality of electron beams. The source assembly also includes two or more sets of positioners configured to actuate the two or more electron beam sources. The SEM system also includes a column assembly. The column assembly includes a plurality of substrate arrays. The column assembly also includes two or more electron-optical columns formed by a set of column electron-optical elements bonded to the plurality of substrate arrays. The SEM system also includes a stage configured to secure a sample that at least one of emits or scatters electrons in response to the plurality of electron beams directed by the two or more electron-optical columns to the sample.

    Non-invasive charged particle beam monitor
    7.
    发明授权
    Non-invasive charged particle beam monitor 有权
    非侵入性带电粒子束监测器

    公开(公告)号：US09390887B2

    公开(公告)日：2016-07-12

    申请号：US14486739

    申请日：2014-09-15

    申请人： KLA-Tencor Corporation

    发明人： Thomas Plettner ,  John Gerling

    IPC分类号： H01J37/22 ,  H01J37/28 ,  H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/22 ,  H01J37/28 ,  H01J37/304 ,  H01J2237/24485 ,  H01J2237/24507 ,  H01J2237/24535 ,  H01J2237/24542 ,  H01J2237/2482

    摘要： An electromagnetic wakefield detector placed in close proximity to a design trajectory of a non-relativistic charged particle beam produces an optical signal in response to passage of the charged particle beam without interrupting the charged particle beam. A photon detector receives the optical signal and produces a corresponding output. The wakefield detector may be based on the electro optic effect. Specifically, the detector may measure the effect of the charged particle beam a beam of radiation on the phase of radiation travelling parallel to the beam in a nearby electro optic waveguide. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

    摘要翻译： 靠近非相对论带电粒子束的设计轨迹放置的电磁雷达场检测器响应于带电粒子束的通过而产生光信号而不中断带电粒子束。 光子检测器接收光信号并产生相应的输出。 尾波检测器可以基于电光效应。 具体地，检测器可以测量带电粒子束的辐射束对在附近的电光波导中平行于光束行进的辐射相位的影响。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

    Array-based characterization tool
    9.
    发明授权
    Array-based characterization tool 有权

    公开(公告)号：US10438769B1

    公开(公告)日：2019-10-08

    申请号：US15969555

    申请日：2018-05-02

    申请人： KLA-Tencor Corporation

    发明人： Alex Lipkind ,  Alon Rosenthal ,  Frank Chilese ,  John Gerling ,  Lawrence Muray ,  Robert Haynes

    IPC分类号： H01J37/28 ,  G21K5/04 ,  H01J37/147 ,  H01J37/153 ,  H01J37/244

    摘要： A scanning electron microscopy (SEM) system includes a plurality of electron beam sources configured to generate a primary electron beam. The SEM system includes an electron-optical column array with a plurality of electron-optical columns. An electron-optical column includes a plurality of electron-optical elements. The plurality of electron-optical elements includes a deflector layer configured to be driven via a common controller shared by at least some of the plurality of electron-optical columns and includes a trim deflector layer configured to be driven by an individual controller. The plurality of electron-optical elements is arranged to form an electron beam channel configured to direct the primary electron beam to a sample secured on a stage, which emits an electron beam in response to the primary electron beam. The electron-optical column includes an electron detector. The electron beam channel is configured to direct the electron beam to the electron detector.

    Apparatus and method for fine-tuning magnet arrays with localized energy delivery
    10.
    发明授权
    Apparatus and method for fine-tuning magnet arrays with localized energy delivery 有权

    公开(公告)号：US09779872B2

    公开(公告)日：2017-10-03

    申请号：US14565166

    申请日：2014-12-09

    申请人： KLA-Tencor Corporation

    发明人： John Gerling

    IPC分类号： H01F13/00 ,  H01F41/02

    CPC分类号： H01F41/0286

    摘要： One embodiment relates to an apparatus for adjustment of local magnetic strength in a magnetic device. A stage holds the magnetic device, and a sensor measures a magnetic field at locations above the magnetic device so as to generate magnetic field data. A computer system detects a non-uniformity in the magnetic field from the magnetic field data and determines a location and a duration for application of a pulsed laser beam to correct the non-uniformity. A laser device applies the pulsed laser beam at said location for said duration. Another embodiment relates to a method of adjusting local magnetic strength in a magnetic device. Another embodiment relates to a system for fine-tuning a magnet array with localized energy delivery. Other embodiments, aspects and features are also disclosed.