Invention Grant
- Patent Title: Gas injector particle removal process and apparatus
- Patent Title (中): 气体喷射器颗粒去除过程和装置
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Application No.: US13929890Application Date: 2013-06-28
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Publication No.: US09390895B2Publication Date: 2016-07-12
- Inventor: Cliff LaCroix , Armen Avoyan
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: B08B11/00
- IPC: B08B11/00 ; H01J37/32 ; B08B3/10 ; B08B3/12 ; C11D11/00

Abstract:
A sonic cleaning tool having a component retaining fixture, a sonic bath, and a cleaning fluid circulating system. The sonic bath has a sound field transducer and is structurally configured to place the component retaining fixture in sonic communication with the sound field transducer within the sonic bath. The component retaining fixture comprises a first end plate, a second end plate, a first component securing member, a second component securing member, and a plurality of compression studs. The first component securing member projects from the first end plate and is structurally configured for repeatable transition between a retracted position and an extended position. The second component securing member projects from the second end plate. The compression studs of the component retaining fixture span from the first end plate to the second end plate and are spaced to form a plurality of sonic transmission windows between the compression studs. The sonic transmission windows collectively place a majority of a component disposed in the component retaining fixture in substantially unobstructed sonic communication with the sound field transducer of the sonic bath. The cleaning fluid circulating system has a cleaning fluid, a cleaning fluid supply reservoir, a deionized water supply, and a compressed dry air supply, which are fluidly connected to the component retaining fixture.
Public/Granted literature
- US20150000712A1 GAS INJECTOR PARTICLE REMOVAL PROCESS AND APPARATUS Public/Granted day:2015-01-01
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