Invention Grant
- Patent Title: High-voltage metal-oxide-semiconductor transistor device and manufacturing method thereof
- Patent Title (中): 高压金属氧化物半导体晶体管器件及其制造方法
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Application No.: US14805474Application Date: 2015-07-22
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Publication No.: US09391196B1Publication Date: 2016-07-12
- Inventor: Kai-Kuen Chang , Chia-Min Hung , Shih-Yin Hsiao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/06 ; H01L29/08

Abstract:
A high-voltage metal-oxide-semiconductor (HV MOS) transistor device and a manufacturing method thereof are provided. The HV MOS transistor device includes a semiconductor substrate, a gate structure, a first sub-gate structure, and a drain region. The gate structure is disposed on the semiconductor substrate. The semiconductor substrate has a first region and a second region respectively disposed on two opposite sides of the gate structure. The first sub-gate structure is disposed on the semiconductor substrate, the first sub-gate structure is separated from the gate structure, and the first sub-gate structure is disposed on the first region of the semiconductor substrate. The drain region is disposed in the first region of the semiconductor substrate. The drain region is electrically connected to the first sub-gate structure via a first contact structure disposed on the drain region and the first sub-gate structure.
Information query
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