Invention Grant
US09394619B2 Methods of adding dopants to conductive interconnect structures in substrate technologies and structures formed thereby
有权
将掺杂剂添加到由此形成的衬底技术和结构中的导电互连结构的方法
- Patent Title: Methods of adding dopants to conductive interconnect structures in substrate technologies and structures formed thereby
- Patent Title (中): 将掺杂剂添加到由此形成的衬底技术和结构中的导电互连结构的方法
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Application No.: US13795042Application Date: 2013-03-12
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Publication No.: US09394619B2Publication Date: 2016-07-19
- Inventor: Rajen S. Sidhu , Mukul P. Renavikar , Sandeep B. Sane
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Winkle, PLLC
- Main IPC: H05K1/09
- IPC: H05K1/09 ; H05K1/03 ; C25D3/58 ; C25D5/02 ; H05K3/42 ; H05K3/46 ; C23C18/48

Abstract:
Methods of forming a microelectronic packaging structure and associated structures formed thereby are described. Those methods and structures may include forming an opening in a dielectric material of a package substrate, and then plating a conductive interconnect structure in the opening utilizing a plating process. The plating process may comprises a conductive metal and a dopant comprising between about 0.05 and 10 percent weight, wherein the dopant comprises at least one of magnesium, zirconium and zinc.
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