Invention Grant
- Patent Title: Position measuring device and position measuring method
- Patent Title (中): 位置测量装置和位置测量方法
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Application No.: US14617168Application Date: 2015-02-09
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Publication No.: US09395178B2Publication Date: 2016-07-19
- Inventor: Toshihisa Takai , Masahito Miyazaki
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2014-025034 20140213
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01S17/48 ; G01S7/491 ; G01S17/88 ; G01S7/481

Abstract:
A position measuring device includes a light emitter, an image capturer, a first beam splitter, a first light receiver, a second light receiver, a calculator, and a controller. The first light receiver receives light that propagates along a first optical axis toward the light emitter and is reflected by the first beam splitter, and outputs a first signal. The second light receiver outputs a second signal corresponding to an intensity of light propagating along a second optical axis toward the image capturer. The controller controls the intensity of the laser light based on the second signal when a difference between the first signal and the second signal is smaller than a predetermined threshold, and performs control so that the laser light has a predetermined intensity when the difference between the first signal and the second signal is equal to or greater than the threshold.
Public/Granted literature
- US20150226852A1 POSITION MEASURING DEVICE AND POSITION MEASURING METHOD Public/Granted day:2015-08-13
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