公开(公告)号：US09395178B2

公开(公告)日：2016-07-19

申请号：US14617168

申请日：2015-02-09

Applicant: MITUTOYO CORPORATION

Inventor： Toshihisa Takai ,  Masahito Miyazaki

IPC: G01B11/14 ,  G01S17/48 ,  G01S7/491 ,  G01S17/88 ,  G01S7/481

CPC classification number: G01B11/14 ,  G01S7/4813 ,  G01S7/4814 ,  G01S7/4816 ,  G01S7/4918 ,  G01S17/48 ,  G01S17/88

Abstract: A position measuring device includes a light emitter, an image capturer, a first beam splitter, a first light receiver, a second light receiver, a calculator, and a controller. The first light receiver receives light that propagates along a first optical axis toward the light emitter and is reflected by the first beam splitter, and outputs a first signal. The second light receiver outputs a second signal corresponding to an intensity of light propagating along a second optical axis toward the image capturer. The controller controls the intensity of the laser light based on the second signal when a difference between the first signal and the second signal is smaller than a predetermined threshold, and performs control so that the laser light has a predetermined intensity when the difference between the first signal and the second signal is equal to or greater than the threshold.

Abstract translation: 位置测量装置包括光发射器，图像捕获器，第一分束器，第一光接收器，第二光接收器，计算器和控制器。 第一光接收器接收沿着第一光轴朝向光发射器传播并被第一分束器反射并且输出第一信号的光。 第二光接收器输出对应于沿着第二光轴向着图像捕获器传播的光的强度的第二信号。 当第一信号和第二信号之间的差小于预定阈值时，控制器基于第二信号控制激光的强度，并且当第一信号与第二信号之间的差值小于预定阈值时执行控制，使得激光具有预定的强度 信号，第二信号等于或大于阈值。

公开(公告)号：US10514292B2

公开(公告)日：2019-12-24

申请号：US15166938

申请日：2016-05-27

Applicant: MITUTOYO CORPORATION

Inventor： Masahito Miyazaki

IPC: G01J1/04 ,  G02B26/12 ,  G02B26/10 ,  G01S7/497 ,  G01S7/481 ,  G01S17/48 ,  G01S17/42

Abstract: An optical probe includes a first resonant scanner having a first mirror capable of rotating centered around a drive axis, the first resonant scanner reflecting emitted light from a light source toward a measured object, and a second resonant scanner having a second mirror capable of rotating centered around the drive axis, the second resonant scanner reflecting light reflected from the measured object toward a photoreceiver. The first mirror and the second mirror are rotationally driven in synchronization.