Invention Grant
- Patent Title: Methods of forming transistor gates
- Patent Title (中): 形成晶体管栅极的方法
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Application No.: US14225053Application Date: 2014-03-25
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Publication No.: US09396952B2Publication Date: 2016-07-19
- Inventor: Yongjun Jeff Hu
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L21/3205
- IPC: H01L21/3205 ; H01L21/4763 ; H01L21/28 ; H01L27/115 ; H01L29/423 ; H01L29/66 ; H01L29/792

Abstract:
Some embodiments include methods of forming charge storage transistor gates and standard FET gates in which common processing is utilized for fabrication of at least some portions of the different types of gates. FET and charge storage transistor gate stacks may be formed. The gate stacks may each include a gate material, an insulative material, and a sacrificial material. The sacrificial material is removed from the FET and charge storage transistor gate stacks. The insulative material of the FET gate stacks is etched through. A conductive material is formed over the FET gate stacks and over the charge storage transistor gate stacks. The conductive material physically contacts the gate material of the FET gate stacks, and is separated from the gate material of the charge storage transistor gate stacks by the insulative material remaining in the charge storage transistor gate stacks. Some embodiments include gate structures.
Public/Granted literature
- US20140206183A1 Semiconductor Constructions, Methods Of Forming Transistor Gates, And Methods Of Forming NAND Cell Units Public/Granted day:2014-07-24
Information query
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