Invention Grant
- Patent Title: Processes and apparatuses for manufacturing wafers
- Patent Title (中): 制造晶圆的工艺和设备
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Application No.: US13954868Application Date: 2013-07-30
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Publication No.: US09404198B2Publication Date: 2016-08-02
- Inventor: Andrew X. Yakub
- Applicant: Andrew X. Yakub
- Applicant Address: US CA Santa Monica
- Assignee: Rayton Solar Inc.
- Current Assignee: Rayton Solar Inc.
- Current Assignee Address: US CA Santa Monica
- Agency: Lowry Blixseth LLP
- Agent Scott M. Lowry
- Main IPC: C30B33/06
- IPC: C30B33/06 ; C30B13/24 ; C30B33/04 ; B28D1/02 ; B28D5/00 ; C30B29/06

Abstract:
The process for manufacturing wafers includes the steps of mounting an ingot as a work piece in a manner that permits rotation about a longitudinal axis of rotation and rotating the ingot about its longitudinal axis of rotation to permit a microwave device that generates an energized beam to penetrate an outer surface layer thereof. Furthermore, the process includes exfoliating the outer surface layer with the energized beam, removing the exfoliated outer surface layer from the ingot as a continuous planar strip and cutting the continuous planar strip into a wafer.
Public/Granted literature
- US20140026617A1 PROCESSES AND APPARATUSES FOR MANUFACTURING WAFERS Public/Granted day:2014-01-30
Information query
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