发明授权
US09406579B2 Semiconductor device and method of controlling warpage in semiconductor package
有权
半导体封装中的翘曲控制半导体装置及其控制方法
- 专利标题: Semiconductor device and method of controlling warpage in semiconductor package
- 专利标题(中): 半导体封装中的翘曲控制半导体装置及其控制方法
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申请号: US13471314申请日: 2012-05-14
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公开(公告)号: US09406579B2公开(公告)日: 2016-08-02
- 发明人: DaeSik Choi , JoungIn Yang , Sang Mi Park , WonIl Kwon , YiSu Park
- 申请人: DaeSik Choi , JoungIn Yang , Sang Mi Park , WonIl Kwon , YiSu Park
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人: STATS ChipPAC Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L23/31
- IPC分类号: H01L23/31 ; H01L21/56 ; H01L23/00 ; H01L23/367 ; H01L23/42
摘要:
A semiconductor device has a substrate. An insulating layer is formed over a surface of the substrate. A semiconductor die is mounted over the surface of the substrate. A channel is formed in the insulating layer around the semiconductor die. An underfill material is deposited between the semiconductor die and the substrate and in the channel. A heat spreader is mounted over the semiconductor die with the heat spreader thermally connected to the substrate. A thermal interface material is formed over the semiconductor die. The underfill material is deposited between the semiconductor die and the substrate along a first edge of the semiconductor die and along a second edge of the semiconductor die opposite the first edge. The channel extends partially through the insulating layer formed over the substrate with the insulating layer maintaining coverage over the substrate within a footprint of the channel.
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