Invention Grant
US09410234B2 Sputtering device and method of forming layer using the same 有权
溅射装置及其形成方法

Sputtering device and method of forming layer using the same
Abstract:
Provided are a sputtering device and a method of forming a layer using the same.The method of forming a layer using the sputtering device includes: placing a substrate within a chamber; depositing target particles emitted from a target, which faces the substrate, on the substrate using a sputtering process; and horizontally moving a plurality of shield rods, which are installed in a shield mask disposed between the substrate and the target and are separated from each other along a first direction, during the sputtering process.
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