Invention Grant
- Patent Title: Sputtering device and method of forming layer using the same
- Patent Title (中): 溅射装置及其形成方法
-
Application No.: US14670403Application Date: 2015-03-26
-
Publication No.: US09410234B2Publication Date: 2016-08-09
- Inventor: Hyun Ju Kang , Sang Woo Sohn , Sang Won Shin , Dong Hee Lee , Chang Oh Jeong
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0174898 20141208
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/04

Abstract:
Provided are a sputtering device and a method of forming a layer using the same.The method of forming a layer using the sputtering device includes: placing a substrate within a chamber; depositing target particles emitted from a target, which faces the substrate, on the substrate using a sputtering process; and horizontally moving a plurality of shield rods, which are installed in a shield mask disposed between the substrate and the target and are separated from each other along a first direction, during the sputtering process.
Public/Granted literature
- US20160160340A1 SPUTTERING DEVICE AND METHOD OF FORMING LAYER USING THE SAME Public/Granted day:2016-06-09
Information query
IPC分类: