发明授权
US09411914B2 Simulator, processing system, damage evaluation method and damage evaluation program
有权
模拟器，处理系统，损伤评估方法和损伤评估程序
- 专利标题： Simulator, processing system, damage evaluation method and damage evaluation program
- 专利标题（中）： 模拟器，处理系统，损伤评估方法和损伤评估程序
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申请号： US13323373申请日： 2011-12-12
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公开(公告)号： US09411914B2公开(公告)日： 2016-08-09
- 发明人: Nobuyuki Kuboi , Tetsuya Tatsumi
- 申请人： Nobuyuki Kuboi , Tetsuya Tatsumi
- 申请人地址： JP Tokyo
- 专利权人： Sony Corporation
- 当前专利权人： Sony Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Chip Law Group
- 优先权： JP2010-284130 20101221
- 主分类号： G06F7/60
- IPC分类号： G06F7/60 ; G06F17/10 ; G06F17/50
摘要：
Disclosed herein is a simulator including: an input section adapted to acquire processing conditions for a given process performed on a workpiece; and a damage calculation section adapted to acquire the damage of the workpiece, based on the processing conditions, by calculating, using a Flux method, the relationship between the amount of a first substance externally injected onto a given evaluation point on the workpiece during the given process and the amount of a second substance released from the given evaluation point on the workpiece as a result of the injection of the first substance.
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