Invention Grant
US09412717B2 Apparatus and methods for molded underfills in flip chip packaging
有权
倒装芯片封装中模制底层填料的设备和方法
- Patent Title: Apparatus and methods for molded underfills in flip chip packaging
- Patent Title (中): 倒装芯片封装中模制底层填料的设备和方法
-
Application No.: US13289719Application Date: 2011-11-04
-
Publication No.: US09412717B2Publication Date: 2016-08-09
- Inventor: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
- Applicant: Meng-Tse Chen , Hsiu-Jen Lin , Chun-Cheng Lin , Wen-Hsiung Lu , Ming-Da Cheng , Chung-Shi Liu
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L23/00 ; B29C43/18 ; H01L21/56 ; B29C33/68

Abstract:
Methods and apparatus for a forming molded underfills. A method is disclosed including loading a flip chip substrate into a selected one of the upper mold chase and lower mold chase of a mold press at a first temperature; positioning a molded underfill material in the at least one of the upper and lower mold chases while maintaining the first temperature which is lower than a melting temperature of the molded underfill material; forming a sealed mold cavity and creating a vacuum in the mold cavity; raising the temperature of the molded underfill material to a second temperature greater than the melting point to cause the molded underfill material to flow over the flip chip substrate forming an underfill layer and forming an overmolded layer; and cooling the flip chip substrate to a third temperature substantially lower than the melting temperature of the molded underfill material. An apparatus is disclosed.
Public/Granted literature
- US20130115735A1 Apparatus and Methods for Molded Underfills in Flip Chip Packaging Public/Granted day:2013-05-09
Information query
IPC分类: