Invention Grant
- Patent Title: Barrier film techniques and configurations for phase-change memory elements
- Patent Title (中): 用于相变存储元件的阻挡膜技术和配置
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Application No.: US14562473Application Date: 2014-12-05
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Publication No.: US09419212B2Publication Date: 2016-08-16
- Inventor: Christopher W. Petz , Yongjun J. Hu , Dale W. Collins , Allen McTeer
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe Williamson & Wyatt PC
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L21/02 ; H01L27/24 ; H01L29/66

Abstract:
Embodiments of the present disclosure describe barrier film techniques and configurations for phase-change memory elements. In an embodiment, an apparatus includes a plurality of phase-change memory (PCM) elements, wherein individual PCM elements of the plurality of PCM elements include a bottom electrode layer, a select device layer disposed on the bottom electrode layer, a middle electrode layer disposed on the select device layer, a phase-change material layer disposed on the middle electrode layer, a top electrode layer disposed on the phase-change material layer, and a barrier film comprising a group IV transition metal, a group VI transition metal, carbon (C) and nitrogen (N), the barrier film being disposed between the bottom electrode layer and the top electrode layer. Other embodiments may be described and/or claimed.
Public/Granted literature
- US20160163975A1 BARRIER FILM TECHNIQUES AND CONFIGURATIONS FOR PHASE-CHANGE MEMORY ELEMENTS Public/Granted day:2016-06-09
Information query
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