Invention Grant
US09425036B2 Light source device and semiconductor manufacturing apparatus including the same
有权
光源装置及包括该光源装置的半导体制造装置
- Patent Title: Light source device and semiconductor manufacturing apparatus including the same
- Patent Title (中): 光源装置及包括该光源装置的半导体制造装置
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Application No.: US14151166Application Date: 2014-01-09
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Publication No.: US09425036B2Publication Date: 2016-08-23
- Inventor: Wook-Rae Kim , Hashimoto Kohei , Won-Don Joo , Kwang-Soo Kim , Byeong-Hwan Jeon , Sue-Jin Cho
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2013-0020543 20130226
- Main IPC: H01J61/02
- IPC: H01J61/02
Abstract:
Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.
Public/Granted literature
- US20140239795A1 LIGHT SOURCE DEVICE AND SEMICONDUCTOR MANUFACTURING APPARATUS INCLUDING THE SAME Public/Granted day:2014-08-28
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