公开(公告)号：US09425036B2

公开(公告)日：2016-08-23

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Wook-Rae Kim ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。

公开(公告)号：US09374883B2

公开(公告)日：2016-06-21

申请号：US14560732

申请日：2014-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Young-Kyu Park ,  Wook-Rae Kim ,  Byeong-Hwan Jeon ,  Hashimoto Kohei

IPC: H05G2/00

CPC classification number: H05G2/008 ,  H05G2/003

Abstract: A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.

Abstract translation: 提供了一种等离子体光源装置。 等离子体光源装置包括腔室，激光产生部件和曲面镜。 腔室包括用于产生激光诱导等离子体的等离子体源气体。 激光产生部分与腔室间隔开并产生中空的激光束。 曲面镜设置在腔室和激光产生部件之间。 曲面镜被配置为反射并将产生的中空激光束冷凝到腔室中，以在腔室中产生激光感应等离子体，并且反射从产生的激光诱导等离子体发射的光。

公开(公告)号：US20140239795A1

公开(公告)日：2014-08-28

申请号：US14151166

申请日：2014-01-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： WOOK-RAE KIM ,  Hashimoto Kohei ,  Won-Don Joo ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Sue-Jin Cho

IPC: H01J61/02

CPC classification number: H01J61/025 ,  G03F7/70016 ,  G03F7/70175 ,  H01J61/545 ,  H01J61/86 ,  H01J65/042

Abstract: Provided are a light source device and a semiconductor manufacturing apparatus including the same. The light source device includes a light-emitting lamp. The light source device includes a laser generator configured to generate and direct a laser beam to the light-emitting lamp. The light source device includes a recycling optical element configured to redirect the laser beam to the light-emitting lamp. The recycling optical element includes a first recycling optical modulator configured to change the phase of the laser beam.

Abstract translation: 提供一种光源装置和包括该光源装置的半导体制造装置。 光源装置包括发光灯。 光源装置包括：激光发生器，被配置为产生并将激光束定向到发光灯。 光源装置包括被配置为将激光束重定向到发光灯的再循环光学元件。 回收光学元件包括被配置为改变激光束的相位的第一再循环光学调制器。