Invention Grant
US09431424B1 Method for creating metal gate resistor in FDSOL and resulting device
有权
在FDSOL和结果器件中制作金属栅极电阻的方法
- Patent Title: Method for creating metal gate resistor in FDSOL and resulting device
- Patent Title (中): 在FDSOL和结果器件中制作金属栅极电阻的方法
-
Application No.: US14872294Application Date: 2015-10-01
-
Publication No.: US09431424B1Publication Date: 2016-08-30
- Inventor: Xusheng Wu
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L27/12 ; H01L21/84 ; H01L21/762 ; H01L49/02 ; H01L21/28 ; H01L21/311 ; H01L21/283 ; H01L27/06 ; H01L29/423 ; H01L29/06 ; H01L21/306

Abstract:
Fabricating FEOL metal gate resistor structures and the resulting device are disclosed. Embodiments include providing a Si layer-insulator layer-Si substrate stack; forming STI regions at first through fourth sides of a rectangular active-area of the Si layer, the first side opposing the third, the STI extending into the substrate; recessing the STI below the insulator upper surface; undercutting the active-area, forming channels in the insulator along and under perimeter edges of the active-area; conformally forming a high-k dielectric on all exposed surfaces; forming metal on the high-k dielectric and filling the channels; removing the metal except for the filled channels and a portion over each of the STI at the first and third sides and overlapping the active-area; and forming low-k spacers on exposed opposing sidewalls of the metal portions and exposed vertical surfaces of the high-k dielectric on edges of the active-area and the filled channels.
Information query
IPC分类: