Invention Grant
- Patent Title: Calculating power input to an array of thermal control elements to achieve a two-dimensional temperature output
- Patent Title (中): 计算热控制元件阵列的功率输入以实现二维温度输出
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Application No.: US14173149Application Date: 2014-02-05
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Publication No.: US09435692B2Publication Date: 2016-09-06
- Inventor: Ole Waldmann , Eric A. Pape , Robert Griffith O'Neill , Francisco Martinez
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: G01K15/00
- IPC: G01K15/00 ; G01J5/02 ; H01L21/67 ; H01L21/683
Abstract:
A method for calculating power input to at least one thermal control element of an electrostatic chuck includes: setting the at least one thermal control element to a first predetermined power level; measuring a first temperature of the at least one thermal control element when the at least one thermal control element is powered at the first predetermined power level; setting the at least one thermal control element to a second predetermined power level; measuring a second temperature of the at least one thermal control element when the at least one thermal control element is powered at the second predetermined power level; calculating a difference between the first temperature and the second temperature; calculating a system response of the at least one thermal control element based on the difference; inverting the system response; and calibrating the at least one thermal control element based on the inverted system response.
Public/Granted literature
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