Invention Grant
- Patent Title: Focusing optical systems and methods for testing semiconductors
- Patent Title (中): 聚焦光学系统和半导体测试方法
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Application No.: US13634009Application Date: 2011-03-14
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Publication No.: US09435858B2Publication Date: 2016-09-06
- Inventor: Peter Andrews , David Hess
- Applicant: Peter Andrews , David Hess
- Applicant Address: US OR Beaverton
- Assignee: CASCADE MICROTECH, INC.
- Current Assignee: CASCADE MICROTECH, INC.
- Current Assignee Address: US OR Beaverton
- Agency: Dascenzo Intellectual Property Law
- International Application: PCT/US2011/028373 WO 20110314
- International Announcement: WO2011/113051 WO 20110915
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01B9/04 ; G01B21/16
Abstract:
Focusing optical systems and methods for testing semiconductors are disclosed herein. The methods include receiving an image of a probe through a single optical path of a microscope, substantially focusing the microscope on the probe, and determining a vertical height adjustment between the probe and a device under test based upon the focusing.
Public/Granted literature
- US20130010099A1 SYSTEM FOR TESTING SEMICONDUCTORS Public/Granted day:2013-01-10
Information query
